Liqui-Cel Membrane Contactors are Selected for Thin Film Transistor Plant

July 24, 2003

Liqui-Cel Membrane Contactors have been chosen as the liquid degassing technology at a TFT Plant in China. The manufactured TFT's will be used primarily in mobile phone and handheld PC displays. Liqui-Cel Contactors will be installed for dissolved oxygen removal in the high purity water system. Dissolved gasses left in the water can cause defects on the TFT surface.



The system is 88 m3/hr (388 gpm) and will utilize Liqui-Cel 10 x 28 Membrane Contactors in hot and cold water loops. The Membrane Contactors will be used to remove dissolved oxygen from saturation to less than 30 parts per billion (ppb). The contactors are capable of removing dissolved oxygen to 1 ppb. The Contactors will operate in combo mode where a small amount of nitrogen and vacuum will be used.

The contactors offer a modular compact solution for dissolved gas control. They have been delivered to the OEM who will begin system fabrication this month. The Contactors are part of an overall water treatment system, which is scheduled to start-up in Q3 of 2003.

Liqui-Cel Membrane Contactors are presently used around the world for adding or removing O2, CO2 and N2 to or from liquids in the Semiconductor, Power, Pharmaceutical, Photographic, Food and Beverage, and many other general industries.

O2 negatively impacts many processes; it is corrosive and can oxidize many materials. In the power and industrial areas, piping and equipment are susceptible to corrosion. Specifically to the semiconductor market, high levels of O2 can cause lower product yields. Additionally, CO2 negatively impacts performance of EDI and Ion Exchange. The Liqui-Cel Contactors offer a modular solution for O2/CO2 removal before these technologies without


chemicals. Liqui-Cel Contactors are also used to add gasses to liquids to enhance megasonic cleaning. The beverage industry looks to membrane contactors for carbonation, nitrogenation and O2 removal. These reflect only a few examples of the variety of applications the Liqui-Cel Membrane Contactors are used for.

Additionally, Membrana offers liquid ring vacuum pumps, eductors and Orbisphere sensors to complement the membrane contactors.

Membrana´s Industrial Membrane Group also manufactures a variety of membranes used for filtration in various industries and applications. Manufacturing facilities are located in the USA and Europe. Global markets are served through sales offices and affiliates in North America, Europe, Japan, South East Asia and China.

Source:

Liqui-Cel

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